Lead Zirconate Titanate Films Produced by ‘Facing Targets’ RF-Sputtering
Lead Zirconate Titanate Films Produced by ‘Facing Targets’ RF-Sputtering
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通过“面向靶材”射频溅射生产锆钛酸铅薄膜
DOI：
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发表时间：
1990
期刊：
影响因子：
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通讯作者：
J. Cuomo
中科院分区：
文献类型：
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作者：
R. Roy;K. Etzold;J. Cuomo
介绍了用对向靶射频溅射法生长锆钛酸铅铁电薄膜的方法。这项研究的重点是生产瘦(
The growth of ferroelectric lead zirconate titanate (PZT) films by rf-sputtering using facing targets is described. This study has focused on producing thin (