Mechanically coupled SOI Lamé-mode resonator-arrays: Synchronized oscillations with high quality factors of 1 million
Mechanically coupled SOI Lamé-mode resonator-arrays: Synchronized oscillations with high quality factors of 1 million
复制标题
机械耦合 SOI Lamé 模式谐振器阵列：同步振荡，品质因数高达 100 万
DOI：
10.1109/eftf-ifc.2013.6702184
复制
发表时间：
2013
期刊：
影响因子：
--
通讯作者：
Joshua E
中科院分区：
文献类型：
--
作者：
Yuanjie Xu;Joshua E
在这项工作中，我们提出了第一次演示的同步振荡的SOI谐振器阵列的品质因数（Qs）在106的顺序通过机械耦合。我们已经制造了多达六个谐振器的阵列。我们的实验结果表明，即使阵列的长度扩大，Q保持在106的数量级在13MHz的谐振频率。这产生了1.3×1013的f·Q积，这接近于单个拉梅模式谐振器的f·Q积。当Q值保持在106时，我们的结果表明，动态电阻根据并入阵列的谐振器的数量而减小。这些结果反过来表明，机械耦合可以扩展到甚至更长的阵列，以减少运动阻力，以及改善功率处理，而不会显着降低Q。
In this work, we present the first demonstration of synchronized oscillations in an SOI resonator array with quality factors (Qs) in the order of 106 through mechanical coupling. We have fabricated arrays of up to six resonators. Our experimental results indicate that even as the length of the array is expanded, Q is maintained in the order of 106 at a resonant frequency of 13MHz. This yields an f·Q product of 1.3×1013, which is close to that of a single Lamé mode resonator. With Q maintained at 106, our results show that the motional resistance reduces according to the number of resonators incorporated into the array. These results in turn suggest that mechanical coupling can be extended to even yet longer arrays for reducing motional resistance as well as improve power handling without notably diminishing Q.