Parallel direct laser writing in three dimensions with spatially dependent aberration correction
Parallel direct laser writing in three dimensions with spatially dependent aberration correction
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DOI:
10.1364/oe.18.021090
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发表时间:
2010-09-27
期刊:
影响因子:
3.8
通讯作者:
Booth, Martin J.
中科院分区:
文献类型:
--
作者:
Jesacher, Alexander;Booth, Martin J.
We propose a hologram design process which aims at reducing aberrations in parallel three-dimensional direct laser writing applications. One principle of the approach is to minimise the diffractive power of holograms while retaining the degree of parallelisation. This reduces focal distortion caused by chromatic aberration. We address associated problems such as the zero diffraction order and aberrations induced by a potential refractive index mismatch between the immersion medium of the microscope objective and the fabrication substrate. Results from fabrication in diamond, fused silica and lithium niobate are presented. (C) 2010 Optical Society of America