Disc-shaped nanocrystal model for simulating the diffraction peak profile from a one-dimensional superlattice and its application to Pt/AlN superlattice films
Disc-shaped nanocrystal model for simulating the diffraction peak profile from a one-dimensional superlattice and its application to Pt/AlN superlattice films
复制标题
模拟一维超晶格衍射峰轮廓的盘形纳米晶模型及其在 Pt/AlN 超晶格薄膜中的应用
DOI：
10.1107/s1600576716005483
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发表时间：
2016
影响因子：
6.1
通讯作者：
Ji Shi and Yoshio Nakamura
中科院分区：
文献类型：
--
作者：
Takashi Harumoto;Takumi Sannomiya;Shinji Muraishi;Ji Shi and Yoshio Nakamura
基于Pt/AlN多层膜在退火后呈现出超晶格峰的薄膜结构，提出了一种从一维超晶格模拟其衍射线轮廓的圆盘状纳米晶体模型。所提出的模型表明，只要纳米晶体的厚度和面内晶体尺寸都在纳米数量级，即使只有两个圆盘状纳米晶体，即使取向偏差很大（几度），也可以产生超晶格峰。利用该模型，定量分析了Pt/AlN超晶格的超晶格峰，并讨论了退火对薄膜的影响。
On the basis of the film structure of a Pt/AlN multilayer film which exhibits a superlattice peak after annealing, a disc-shaped nanocrystal model is proposed for simulating the diffraction line profile from a one-dimensional superlattice. The proposed model demonstrates that a superlattice peak can arise even from just two disc-shaped nanocrystals and even with a large misorientation (a few degrees), provided both the thickness and the in-plane crystal size of the nanocrystals are of the order of nanometres. Using the model, the superlattice peaks from Pt/AlN superlattices are analysed quantitatively and the effect of annealing on the film is discussed.