Effect of direct current bias field and alternating current excitation field on vibration amplitudes and resonance frequencies of a magnetostrictively actuated bimorph microresonator
Effect of direct current bias field and alternating current excitation field on vibration amplitudes and resonance frequencies of a magnetostrictively actuated bimorph microresonator
复制标题
直流偏置场和交流激励场对磁致伸缩双压电晶片微谐振器振幅和谐振频率的影响
DOI：
10.1063/1.1417998
复制
发表时间：
2002
影响因子：
3.2
通讯作者：
H. Fujita
中科院分区：
文献类型：
--
作者：
T. Bourouina;A. Garnier;H. Fujita
分析了磁力双晶片微谐振器的动态特性。这些谐振器是由一个溅射沉积的TbDy（CoFe）2薄膜上的硅悬臂梁。该薄膜具有超磁致伸缩特性。通过在磁场下的沉积后退火使其各向异性。我们制备了两个样品的易磁化轴的不同取向：沿着悬臂梁宽度轴和取向为22°，分别。外磁场与易磁化轴方向的适当组合可以激发出弯曲和扭转两种振动模式。在这些模式下的振动振幅和共振频率进行了研究。几个实验条件进行了研究。振动振幅的依赖性上施加的磁直流偏置场沿沿着难磁化轴或沿沿着易磁化轴进行了研究。弯曲/扭转振动振幅比被证明是可调的在一个非常宽的范围内，提供有趣的实际应用。此外，依赖…
The dynamic behavior of magnetomechanical bimorph microresonators is analyzed. These resonators are composed of a sputter-deposited TbDy(CoFe)2 thin film on silicon cantilevers. This film has giant magnetostrictive properties. It is made anisotropic by postdeposition annealing under magnetic field. We prepared two samples with different orientations of the easy axis: along the cantilever width axis and with an orientation of 22°, respectively. Both bending and torsion modes of vibration can be excited by proper combination of external magnetic field and the direction of the easy axis. Vibration amplitudes and resonance frequencies are studied in those modes. Several experimental conditions are investigated. The dependence of vibration amplitudes on a magnetic dc bias field applied either along the hard axis or along the easy axis is studied. The bending/torsion vibration amplitude ratio was shown to be tunable over a very wide range, offering interesting practical applications. In addition, the dependence...