Chemical amplification resists: History and development within IBM
Chemical amplification resists: History and development within IBM
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DOI：
10.1147/rd.411.0069
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发表时间：
1997-01-01
影响因子：
1.3
通讯作者：
Ito, H
中科院分区：
文献类型：
--
作者：
Ito, H
化学放大的概念是在ISM研究所发明的，并迅速在公司的动态随机存取存储器设备的生产中投入使用。它仍然是设计用于短波长（
The chemical amplification concept was invented at ISM Research and quickly brought into use in the production of dynamic random access memory devices in the company. It has remained as an important foundation for the design of advanced resist systems for use in short-wavelength (