Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc
Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc
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DOI：
10.1016/s0257-8972(98)00475-7
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发表时间：
1998-06
影响因子：
5.4
通讯作者：
B. Tay;X. Shi;H. Tan;H. Yang;Zhili Sun
中科院分区：
文献类型：
--
作者：
B. Tay;X. Shi;H. Tan;H. Yang;Zhili Sun
本文研究了四面体非晶碳（ta-C）薄膜的拉曼光谱随碳离子入射能量的变化。为了定量分析光谱，使用最小二乘计算机程序拟合拉曼光谱。随着薄膜中sp3/sp2键合比的增加，薄膜的相对拉曼强度降低。特别是，从拟合的参数之间的相对强度比和sp3分数显示出很强的相关性。
Raman spectra of tetrahedral amorphous carbon (ta-C) films have been obtained as a function of impinging carbon ion energy. In order to analyze the spectra quantitatively, the Raman spectra were fitted using a least-squares computer program. The relative Raman intensity is found to decrease with increasing sp3/sp2bonding ratio in the films. In particular, the parameters from the fits show a strong correlation between the relative intensity ratio and the sp3fraction.