Video-rate optical low-coherence reflectometry based on a linear smart detector array.
Video-rate optical low-coherence reflectometry based on a linear smart detector array.
复制标题
DOI：
10.1364/ol.25.000102
复制
发表时间：
2000-01
期刊：
影响因子：
3.6
通讯作者：
S. Bourquin;V. Monterosso;P. Seitz;R. Salathé
中科院分区：
文献类型：
--
作者：
S. Bourquin;V. Monterosso;P. Seitz;R. Salathé
A low-coherence reflectometer based on a conventional Michelson interferometer and a novel silicon detector chip that allows parallel heterodyne detection is presented. Cross-sectional images of 64x256 pixels covering an area of 1.92 mm x 1.3 mm are acquired at video rate and with a sensitivity close to the shot-noise limit. Applications in surface profiling and thickness measurement are demonstrated.
