The multipole resonance probe: Realization of an optimized radio-frequency plasma probe based on active plasma resonance spectroscopy
The multipole resonance probe: Realization of an optimized radio-frequency plasma probe based on active plasma resonance spectroscopy
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多极共振探针：基于主动等离子体共振光谱的优化射频等离子体探针的实现
DOI：
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发表时间：
2010
期刊：
影响因子：
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通讯作者：
I. Rolfes
中科院分区：
文献类型：
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作者：
C. Schulz;M. Lapke;J. Oberrath;R. Storch;T. Styrmoll;C. Zietz;P. Awakowicz;R. Brinkmann;T. Musch;T. Mussenbrock;I. Rolfes
提出了一种诊断概念，它可以同时测定等离子体密度，电子温度和碰撞率在低压气体放电。所提出的方法利用一个射频驱动的探头，特别是球形设计，这是沉浸在等离子体激发一个家庭的空间有界的表面共振。对测得的探针吸收光谱S（ω）的分析提供了关于其附近等离子体分布的信息，从中可以推断等离子体参数的值。在其最简单的实现中，探头由两个介电屏蔽的导电半球组成，它们由射频源对称驱动，激发的共振可以被归类为多极场，这允许对测量信号进行分析评估。的分析结果，三维场模拟，并首次测量的原型的比较显示所提出的探头概念的功能。
A diagnostic concept is presented which enables the simultaneous determination of plasma density, electron temperature, and collision rate in low-pressure gas discharges. The proposed method utilizes a radio-frequency driven probe of particular spherical design which is immersed in the plasma to excite a family of spatially bounded surface resonances. An analysis of the measured absorption spectrum S(ω) of the probe provides information on the distribution of the plasma in its vicinity, from which the values of the plasma parameters can be inferred. In its simplest realization, the probe consists of two dielectrically shielded, conducting hemispheres, which are symmetrically driven by a radio-frequency source, and the excited resonances can be classified as multipole fields, which allows an analytical evaluation of the measured signal. A comparison of the analytical results, 3D-field simulations, and first measurements of a prototype show the functionality of the presented probe concept.