Mechanical Computing in Microelectromechanical Systems (MEMS)
Mechanical Computing in Microelectromechanical Systems (MEMS)
复制标题
微机电系统 (MEMS) 中的机械计算
DOI：
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发表时间：
2003
期刊：
影响因子：
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通讯作者：
K. Bradley
中科院分区：
文献类型：
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作者：
K. Bradley
摘要：多晶硅微电子机械系统(MEMS)中的机械计算设备的设计目标是开发适用于高剂量辐射和高温等恶劣环境的计算设备，以及能够与分子或生物计算机系统接口的设备。设计的设备既包括模拟计算设备，也包括数字计算设备。模拟器件包括积分器、微分器(加法器)、乘法器和执行三角函数的器件。所设计的数字器件是反相器、NAND、NOR和XOR逻辑门。还设计了模数(A-D)和数模(D-A)转换器。这些设计被提交给一家商业表面微加工铸造厂进行制造。然后，完成的MEMS器件被释放并进行测试，以确定正确的操作。在制造和测试的机械器件中，已经演示了工作正常的逆变器、正弦函数器件、余弦函数器件和数模转换器。
Abstract : Mechanical computing devices in polysilicon-based microelectromechanical systems (MEMS) were designed with the goal of developing computing devices for harsh environments, such as those with high dose radiation and high temperatures, as well as devices that may be able to interface with molecular or biological computer systems. The devices that were designed include both analog and digital computing devices. The analog devices include integrators, differentials (summers), multipliers, and those that perform trigonometric functions. The digital devices that were designed are inverters, NAND, NOR, and XOR logic gates. Analog-to-digital (A-to-D) and digital-to-analog (D-to-A) converters were also designed. The designs were submitted to a commercial surface micromachining foundry to be fabricated. The completed MEMS devices were then released and tested to determine proper operation. Of the mechanical devices that have been fabricated and tested, a functioning inverter, sine function device, cosine function device, and digital-to-analog converter have been demonstrated.