Impact of Coupling Between Multiple SAW Modes on Piston Mode Operation of SAW Resonators
Impact of Coupling Between Multiple SAW Modes on Piston Mode Operation of SAW Resonators
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多种 SAW 模式之间的耦合对 SAW 谐振器活塞模式操作的影响
DOI：
10.1109/tuffc.2018.2820011
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发表时间：
2018
期刊：
影响因子：
--
通讯作者：
Hashimoto Ken-ya
中科院分区：
文献类型：
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作者：
Zhang Benfeng;Han Tao;Tang Gongbin;Li Xinyi;Huang Yulin;Omori Tatsuya;Hashimoto Ken-ya
研究了两种声表面波（SAW）相互耦合时的活塞模式工作（PMO）。分析中采用了扩展的薄板模型。首先，一个PMO条件推导出一个封闭的形式。验证了利用两个SAW耦合器实现PMO是可能的，无需增加移相器。它还表明，这种操作提供了一个更宽的频率范围比传统的PMO的横向模式的抑制。然后，针对不同的SiO2-overlay/Al-grating/128° YX-LiNbO 3衬底结构，提取模型中定义的参数，设计出满足PMO条件的结构。最后，对结构进行了三维有限元分析。计算结果与扩展薄板模型的计算结果吻合较好。
This paper investigates piston mode operation (PMO) when two kinds of surface acoustic waves (SAWs) exist and are coupled to each other. The extended thin plate model is used for the analysis. First, a PMO condition is derived in a closed form. It is verified that PMO is possible without adding phase shifters by the use of two SAW coupling. It is also shown that this operation offers suppression of the transverse modes for a wider frequency range than the conventional PMO. Then, parameters defined in the model are extracted for various SiO2-overlay/Al-grating/128° YX-LiNbO3 substrate structures, and the structure satisfying the PMO condition is designed. Finally, the structure is also analyzed using the 3-D finite element method. The result agrees well with that calculated by the extended thin plate model.