Abrupt Source Heterostructures with Lateral-Relaxed/Strained Layers for Quasi-Ballistic CMOS Transistors using Lateral Strain Control Technique of Strained Substrates
Abrupt Source Heterostructures with Lateral-Relaxed/Strained Layers for Quasi-Ballistic CMOS Transistors using Lateral Strain Control Technique of Strained Substrates
复制标题
使用应变衬底横向应变控制技术的准弹道 CMOS 晶体管的具有横向松弛/应变层的突变源异质结构
DOI:
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发表时间:
2010
期刊:
影响因子:
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通讯作者:
and T. Horikawa
中科院分区:
文献类型:
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作者:
T. Mizuno;M. Hasegawa;K. Ikeda;M. Nojiri;and T. Horikawa