Abrupt Source Heterostructures with Lateral-Relaxed/Strained Layers for Quasi-Ballistic CMOS Transistors using Lateral Strain Control Technique of Strained Substrates

Abrupt Source Heterostructures with Lateral-Relaxed/Strained Layers for Quasi-Ballistic CMOS Transistors using Lateral Strain Control Technique of Strained Substrates
复制标题

使用应变衬底横向应变控制技术的准弹道 CMOS 晶体管的具有横向松弛/应变层的突变源异质结构

DOI:
--
复制
发表时间:
2010
期刊:
Extended Abst. of SSDM
影响因子:
--
通讯作者:
and T. Horikawa
and T. Horikawa
中科院分区:
--
文献类型:
--
作者:
T. Mizuno;M. Hasegawa;K. Ikeda;M. Nojiri;and T. Horikawa

文献摘要

相似文献