Nichrome Resistor Properties and Reliability.

Nichrome Resistor Properties and Reliability.
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镍铬合金电阻器的特性和可靠性。

DOI:
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发表时间:
1973
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影响因子:
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通讯作者:
C. Lane
C. Lane
中科院分区:
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文献类型:
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作者:
C. Lane

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摘要:给出了镍铬合金薄膜的物理特性的集合。给出的图表给出了作为成分、沉积速率、沉积方法、基底形态等的函数的性能变化。解决了诸如电迁移相互扩散、腐蚀和电腐蚀等失效机制,并给出了关于真实、可能和不太可能的机制的具体信息。该报告旨在从工艺和可靠性的角度对镍铬合金电阻器技术进行综合审查。
Abstract : A collection of the physical properties of nichrome films is given. Graphs are presented giving property variations as functions of composition, deposition rate, method of deposition, substrate morphology etc. Failure mechanisms such as electromigration interdiffusion, corrosion and electrocorrosion are addressed and specific information is given with regard to real, possible and unlikely mechanisms. The report is intended to give a composite review of nichrome resistor technology from a process and reliability point of view.