Fabrication of transition edge sensor X-ray microcalorimeters for Constellation-X
Fabrication of transition edge sensor X-ray microcalorimeters for Constellation-X
复制标题
Constellation-X 过渡边缘传感器 X 射线微热量计的制造
DOI：
10.1016/j.nima.2003.11.372
复制
发表时间：
2004
影响因子：
1.4
通讯作者：
C. Stahle
中科院分区：
文献类型：
--
作者：
J. Chervenak;F. Finkbeiner;T. Stevenson;D. Talley;R. Brekosky;S. Bandler;E. Figueroa;M. Lindeman;R. Kelley;T. Saab;C. Stahle
NASA的星座- x （Con-X）任务是推进低温探测器技术的驱动因素，需要1000像素的二维阵列，填充率为95%，量子效率为6keV， 1-10keV光子的能量分辨率优于4eV。我们描述了一种鲁棒的过渡边缘传感器制造工艺，可以生产具有接近Con-X规格的集成吸收器的探测器阵列。我们讨论了超导双层沉积的方法、探测器几何形状的定义和吸收器界面等问题。
NASA's Constellation-X (Con-X) mission is a driver for advancing low-temperature detector technologies, requiring 1000-pixel two-dimensional arrays with >95% filling fraction and quantum efficiency at 6keV and better than 4eV energy resolution for 1–10keV photons. We describe a robust transition edge sensor fabrication process that can produce detector arrays with integrated absorbers approaching the specifications of Con-X. We address issues such as the methods of superconducting bilayer deposition, detector geometry definition, and absorber interface.