Nanofabricated solid immersion lenses registered to single emitters in diamond
Nanofabricated solid immersion lenses registered to single emitters in diamond
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DOI：
10.1063/1.3573870
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发表时间：
2011-03-28
影响因子：
4
通讯作者：
O'Brien, J. L.
中科院分区：
文献类型：
--
作者：
Marseglia, L.;Hadden, J. P.;O'Brien, J. L.
我们描述了一种技术，用于制造微米和纳米结构，将荧光缺陷的位置精度优于数百纳米的金刚石。使用共聚焦荧光显微镜和聚焦离子束蚀刻，我们最初定位一个合适的缺陷相对于金刚石表面上的注册标记，然后使用这些坐标蚀刻的结构。我们通过蚀刻一个8 μ m直径的半球定位与单个带负电荷的氮空位缺陷在于其起源的技术。制造前后的荧光光子计数率的直接比较显示出由于半球的存在而增加了八倍。(C)2011年美国物理学会。[doi：10.1063/1.3573870]
We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beam etching, we initially locate a suitable defect with respect to registration marks on the diamond surface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 mu m diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescence photon count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere. (C) 2011 American Institute of Physics. [doi:10.1063/1.3573870]