External cavity laser sensor using synchronously-pumped laser diode for position measurements of rough surfaces
External cavity laser sensor using synchronously-pumped laser diode for position measurements of rough surfaces
复制标题
使用同步泵浦激光二极管进行粗糙表面位置测量的外腔激光传感器
DOI：
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发表时间：
2004
期刊：
影响因子：
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通讯作者：
W. Ertmer
中科院分区：
文献类型：
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作者：
J. Czarske;J. Möbius;K. Moldenhauer;W. Ertmer
提出了一种用于粗糙表面绝对位置测量的新型光学传感器。该技术表面用作抗反射涂层激光二极管的外腔的反射器。对所得模间距的评估确定激光腔长度，即到粗糙表面的距离。通过激光二极管的同步泵浦实现锁模，可以实现高分辨率的测量，位置分辨率为5 μm，时间分辨率为200 μs。
A novel optical sensor for absolute position measurements of rough surfaces is presented. The technical surface acts as reflector of an external cavity for an antireflection-coated laser diode. Evaluation of the resulting mode spacing determines the laser cavity length, i.e. the distance to the rough surface. Modelocking by synchronous pumping of the laser diode allows highly-resolved measurements with position resolution of 5 μm and temporal resolution of 200 μs.