Fast scanning mode and its realization in a scanning acoustic microscope.
Fast scanning mode and its realization in a scanning acoustic microscope.
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DOI：
10.1063/1.3697863
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发表时间：
2012-03
期刊：
影响因子：
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通讯作者：
Bingfeng Ju;Xiaolong Bai;Jian Chen
中科院分区：
文献类型：
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作者：
Bingfeng Ju;Xiaolong Bai;Jian Chen
二维平台的扫描速度决定了机械扫描测量系统的效率。对传统的光栅扫描和螺旋扫描方式进行了详细的扫描时间分析，提出了两种快速的替代扫描方式。在自行研制的扫描声学显微镜上，对常规扫描模式和快速扫描模式下的测量图像进行了比较。总的扫描时间减少了29%的两个建议的快速扫描模式。它将在不牺牲系统稳定性的情况下为高速扫描提供更好的解决方案，并且不会给扫描测量系统的配置带来额外的困难。它们可以很容易地应用于具有压电、直线电机、直流电机等不同驱动执行器的机械扫描测量系统中，所提出的快速光栅和方螺旋扫描模式是在SAM中实现的，而不是专门为SAM设计的，因此具有普遍的适应性，可以应用于其他具有二维机械扫描平台的扫描测量系统中，例如原子力显微镜或扫描隧道显微镜。
The scanning speed of the two-dimensional stage dominates the efficiency of mechanical scanning measurement systems. This paper focused on a detailed scanning time analysis of conventional raster and spiral scan modes and then proposed two fast alternative scanning modes. Performed on a self-developed scanning acoustic microscope (SAM), the measured images obtained by using the conventional scan mode and fast scan modes are compared. The total scanning time is reduced by 29% of the two proposed fast scan modes. It will offer a better solution for high speed scanning without sacrificing the system stability, and will not introduce additional difficulties to the configuration of scanning measurement systems. They can be easily applied to the mechanical scanning measuring systems with different driving actuators such as piezoelectric, linear motor, dc motor, and so on. The proposed fast raster and square spiral scan modes are realized in SAM, but not specially designed for it. Therefore, they have universal adaptability and can be applied to other scanning measurement systems with two-dimensional mechanical scanning stages, such as atomic force microscope or scanning tunneling microscope.