Fabrication of Large Lateral Polycrystalline Silicon Film by Laser Dehydrogenation and Lateral Crystallization of Hydrogenated Nanocrystalline Silicon Films
Fabrication of Large Lateral Polycrystalline Silicon Film by Laser Dehydrogenation and Lateral Crystallization of Hydrogenated Nanocrystalline Silicon Films
复制标题
激光脱氢和氢化纳米晶硅薄膜横向晶化制备大横向多晶硅薄膜
DOI：
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发表时间：
2009
期刊：
影响因子：
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通讯作者：
Akito Hara
中科院分区：
文献类型：
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作者：
Tadashi Sato;Kenichi Yamamoto;Junji Kambara;Kuninori Kitahara;Akito Hara
