Development of separation inspection technique for micro-cracks and particles using non-contact stress-induced light scattering method
Development of separation inspection technique for micro-cracks and particles using non-contact stress-induced light scattering method
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DOI：
10.1117/12.2508375
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发表时间：
2019-03
期刊：
影响因子：
--
通讯作者：
Y. Sakata;N. Terasaki
中科院分区：
文献类型：
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作者：
Y. Sakata;N. Terasaki
精细抛光技术，例如化学机械抛光处理，是玻璃基板制造中的重要技术。然而，这些技术可能会导致玻璃基板表面下的微裂纹，因为它们使用机械摩擦。我们提出了一种非接触热应力诱导光散射法（N-SILSM），使用加热装置检测表面抛光引起的微裂纹。N-SILSM可以检测精细抛光表面下产品中的微裂纹。它是一种利用温度变化引起的应力引起的微裂纹尖端光散射的变化来暴露微裂纹的技术。此外，光学性质由于温度变化而改变。然而，在制造现场，理想的情况是检测系统能够区分微裂纹和微小颗粒。在这份报告中，我们进行了选择性检测的微裂纹和微小颗粒使用N-SILSM与温度变化。实验结果表明，在光散射强度的变化量改变的立方函数，而不管微裂纹的大小，也证实了微小的颗粒显示出很小的光散射强度的变化。此外，微裂纹尺寸估计的可能性，建议从光散射强度的变化幅度。从以上结果可以看出，利用温度变化的N-SILSM可以识别和测量微裂纹和微小颗粒，并且可以根据光散射强度的变化估计微裂纹尺寸。因此，它已被建议，N-SILSM是一个有用的检测技术，用于区分微裂纹和微小颗粒。
Fine-polishing techniques, such as chemical mechanical polishing treatments, are important techniques in glass substrate manufacturing. However, these techniques may cause microcracks under the surface of glass substrates because they use mechanical friction. We propose a Non-contact thermal Stress-Induced LightScattering Method (N-SILSM) using a heating device for inspecting surfaces to detect polishing-induced microcracks. The N-SILSM can detect microcracks in a product under a fine-polished surface. It is a technique for exposing microcracks by exploiting the change in light-scattering from microcrack tips due to temperature variation-induced stress. Additionally, optical properties change due to temperature variations. However, at manufacturing sites, it is ideal that inspection systems be able to distinguish between microcracks and tiny particles. In this report, we carry out the selective detection of microcracks and tiny particles using a N-SILSM with temperature variation. Experimental results showed that the amount of change in the lightscattering intensity alters the cubic function regardless of the size of the microcracks, and also confirmed that tiny particles show very little change in light-scattering intensity. In addition, the possibility of microcrack size estimation was suggested from the magnitude of the change in light-scattering intensity. From the above results, it has been shown that microcracks and tiny particles can be identified and measured by a N-SILSM utilizing temperature change, and that microcrack size estimation can be based on the change in light-scattering intensity. Thus, it has been suggested that N-SILSM is a useful inspection technique for distinguishing between microcracks and tiny particles.