GENERATION OF EXCIMER EMISSION IN DIELECTRIC BARRIER DISCHARGES
GENERATION OF EXCIMER EMISSION IN DIELECTRIC BARRIER DISCHARGES
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DOI：
10.1007/bf00405680
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发表时间：
1991-01-01
期刊：
影响因子：
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通讯作者：
KOGELSCHATZ, U
中科院分区：
文献类型：
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作者：
GELLERT, B;KOGELSCHATZ, U
介质阻挡放电（无声放电）用于激发大量在VUV、UV或可见光谱范围内辐射的准分子。受激物种包括稀有气体二聚物、卤素二聚物以及稀有气体卤素准分子和汞卤素准分子。在许多情况下，可以产生典型的1-17 nm半宽和显著效率（1-10%）的窄带UV辐射。因此，介质阻挡放电提供了一个简单的，多功能的安排，研究准分子形成的基本反应动力学，也承担了大规模的工业UV工艺的巨大潜力。
Dielectric barrier discharges (silent discharges) are used to excite a large number of excimers radiating in the VUV, UV or visible spectral range. The excited species include rare-gas dimers, halogen dimers as well as rare-gas halogen excimers and mercury halogen excimers. In many cases narrow-band UV radiation of typically 1–17 nm halfwidth and remarkable efficiency (1–10%) could be generated. Thus, dielectric barrier discharges provide a simple, versatile arrangement to study the basic reaction kinetics of excimer formation and also bear a substantial potential for large-scale industrial UV processes.