Measurement of VLSI power supply current by electron-beam probing
Measurement of VLSI power supply current by electron-beam probing
复制标题
通过电子束探测测量 VLSI 电源电流
DOI：
10.1109/4.135341
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发表时间：
1992
影响因子：
5.4
通讯作者：
R. Franch
中科院分区：
文献类型：
--
作者：
K. Jenkins;R. Franch
介绍了电子束探针法测量电源噪声和电流的方法。噪声测量可以在被测芯片上进行，电流测量可以在电路板上进行。需要注意的是，电源电压是同时获得的。当通过电子束探测与更大的电路表征或设计验证程序相结合时，这种测量方法特别有用。>；
The measurement of power supply noise and current by electron-beam probing is described. Noise measurements can be made on the chip under test, and current measurements can be made on the circuit board. It is noted that power supply voltages are obtained simultaneously. This measurement method is particularly useful when combined with a larger program of circuit characterization, or design verification, by electron-beam probing. >