Focused Electron Beam Induced Deposition Synthesis of 3D Photonic and Magnetic Nanoresonators
Focused Electron Beam Induced Deposition Synthesis of 3D Photonic and Magnetic Nanoresonators
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DOI：
10.1021/acsanm.9b02182
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发表时间：
2019-12-01
影响因子：
5.9
通讯作者：
Rack, Philip D.
中科院分区：
文献类型：
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作者：
Pakeltis, Grace;Hu, Zhongwei;Rack, Philip D.
虽然许多等离子体现象已经通过在单个二维平面中使用标准纳米级合成来实现，但是通过延伸到第三维中来增强功能应该是可能的。已经探索了几种纳米级合成方法来实现三维（3d）几何形状，然而，缺乏一个强大的战略，合成复杂的3d等离子体结构。在这项研究中，我们利用直写三维纳米打印和薄膜沉积的混合制造三维等离子体结构。聚焦电子束诱导沉积（FEBID）用于存款非等离子体3D支架，其随后用保形SiO2层隔离并涂覆有金层以创建功能性3D等离子体纳米结构。合成了各种棒状天线、开口环纳米谐振器和环形谐振器，并利用低损耗电子能量损失谱（EELS）以纳米级分辨率表征其全等离子体光谱。补充EELS模拟进行解释的光谱和阐明相关的电场和磁场分布的红外和近光学模式。这项工作展示了FEBID支架为3D等离子体激元设备和未来先进光学和磁性超材料的发展提供的灵活性。
While many plasmonic phenomena have been realized by using standard nanoscale synthesis in a single 2-dimensional plane, enhanced functionality should be possible by extending into the third dimension. Several nanoscale synthesis approaches have been explored to achieve 3-dimensional (3d) geometries; however, a robust strategy for synthesizing complex 3d plasmonic architectures is lacking. In this study, we utilize a hybrid of direct-write 3d nanoprinting and thin film deposition to fabricate 3d plasmonic structures. Focused electron beam induced deposition (FEBID) is used to deposit nonplasmonic 3d scaffolds, which are subsequently isolated with a conformal SiO2 layer and coated with a gold layer to create functional 3d plasmonic nanostructures. A variety of rod antennae, split-ring nanoresonators, and ring resonators are synthesized, and low-loss electron energy loss spectroscopy (EELS) is utilized to characterize their full plasmonic spectra with nanoscale resolution. Complementary EELS simulations are performed to interpret the spectra and elucidate the associated electric and magnetic field distributions of the infrared and near optical modes. This work demonstrates the flexibility that FEBID scaffolds offer for the advancement of 3d plasmonic devices and future advanced optical and magnetic metamaterials.