Design and analysts framework for linear permanent-magnet machines
Design and analysts framework for linear permanent-magnet machines
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DOI：
10.1109/28.491486
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发表时间：
1996-03-01
影响因子：
4.4
通讯作者：
Williams, ME
中科院分区：
文献类型：
--
作者：
Trumper, DL;Kim, WJ;Williams, ME
本文提出了一种设计和分析框架的一般类永磁电机。在我们的分析中，表面安装的直线电机组成的永磁体和无铁载流线圈被处理在一个统一的方式通过磁矢势。这种分析是开发设计新颖的线性磁悬浮驱动精密运动控制平台，如用于晶圆步进机，对于这样的电机结构，我们给出了其磁场，力，磁链，电感的绕组，和反电动势的解析公式。我们提供了一个六自由度磁悬浮器的实验结果。这些结果与分析估计吻合得很好。悬浮器使用永磁海尔贝克阵列，以提高其功率效率。通过类比，也存在Halbach阵列的电磁对偶。一个这样的双利用三角形绕组图案，以实现主要是单侧磁场。
This paper presents a design and analysis framework for the general class of permanent-magnet electric machines. In our analysis, surface-mounted linear motors consisting of permanent magnets and iron-less current carrying coils are treated in a uniform way via the magnetic vector potential. This analysis is developed to design novel linear magnetic levitators for driving precision motion control stages such as those used in wafer steppers, For one such motor structure we give analytical formulae for its magnetic field, force, flux linkage, inductance of the winding, and back electromotive force. We provide experimental results with a six-degree-of-freedom magnetic levitator. These results are in good agreement with analytical estimations. The levitator uses a permanent-magnet Halbach array in order to improve its power efficiency. By analogy, there also exists an electromagnetic dual of the Halbach array. One such dual utilizes a triangular winding pattern in order to achieve a primarily single-sided magnetic field.