Algorithm for automatic x-ray photoelectron spectroscopy data processing and x-ray photoelectron spectroscopy imaging
Algorithm for automatic x-ray photoelectron spectroscopy data processing and x-ray photoelectron spectroscopy imaging
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自动X射线光电子能谱数据处理和X射线光电子能谱成像算法
DOI：
10.1116/1.1864053
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发表时间：
2005
期刊：
影响因子：
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通讯作者：
S. Tougaard
中科院分区：
文献类型：
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作者：
S. Tougaard
众所周知，仅基于测量的 XPS 峰值强度的 X 射线光电子能谱 (XPS) 定量可能会导致较大的误差。该问题是由非弹性电子散射导致的强度贡献的强烈深度依赖性引起的，通过开发分析发射电子能量分布的算法解决了这个问题。这些算法现在被广泛使用，但由于它们的实际应用需要操作员交互，因此它们不太适合自动数据处理。最近提出了一种足够鲁棒（即对分析过程的变化不敏感）适合自动化的简化算法[J.真空。科学。技术。 A21，1081（2003）]。对于每个 XPS 峰，该算法确定最外层大约三个非弹性电子平均自由程内相应原子的总量，并且还给出其深度分布的估计。由于该算法可以自动化，它还应该证明......
It is well known that x-ray photoelectron spectroscopy (XPS) quantification based only on the measured XPS-peak intensity can lead to large errors. The problem, which is caused by the strong depth dependence of the intensity contribution due to inelastic electron scattering, was solved by developing algorithms for analysis of the energy distribution of emitted electrons. These algorithms are now widely used but since their practical application requires operator interaction, they are not well suited for automatic data processing. A simplified algorithm that is sufficiently robust (i.e., insensitive to variations in analysis procedure) to be suitable for automation was suggested recently [J. Vac. Sci. Technol. A21, 1081 (2003)]. For each XPS peak, this algorithm determines the total amount of the corresponding atoms within the outermost approximately three inelastic electron mean free paths and it also gives an estimate of their depth distribution. Since the algorithm can be automated, it should also prove...