Fabrication of normally-closed bidirectional micropumps in silicon-polymer technology featuring photopatternable silicone valve lips
Fabrication of normally-closed bidirectional micropumps in silicon-polymer technology featuring photopatternable silicone valve lips
复制标题
DOI：
10.1016/j.sna.2011.03.042
复制
发表时间：
2011-07-01
影响因子：
4.6
通讯作者：
Woias, Peter
中科院分区：
文献类型：
--
作者：
Lemke, Thomas;Biancuzzi, Giovanni;Woias, Peter
本出版物介绍了新型常闭式双向微泵。他们的主要创新是将传统的硅微机械加工与创新的多功能聚合物技术相结合的制造工艺。因此，采用了灵活而坚固的晶片级键合技术，该技术基于Ordyl SY300系列可叠层永久干膜光刻胶。此外，利用Ordyl的光刻能力，可以同时制造3DMEMS流体结构，如微通道，或者在本研究中，泵和阀腔。为了建立和集成两个灵活的、耐颗粒的常闭微型阀并将其集成到微泵中，在制造过程中引入了商业上可获得的可旋转硅氧烷(道康宁WL5150)。在Ordyl晶片键合过程中，获得了硅胶材料的可重复机械预变形(2.8µm)的定义。这种特点的组合产生了常闭特性，并在闭合状态下产生了极小的泄漏流量，最高可达500 mbar的施加背压。此外，多层压电致动器技术的使用证明了将压电驱动电压从以前的360V(p-p)(峰峰值)大幅降低到30V(p-p)的能力。所设计的微泵只需采用反向驱动方案即可双向工作。由于压缩比提高到0.512，所提出的微型泵是自吸的，可以泵送水和空气。在抽水模式下测得的峰值流量为1.65毫升x分钟(-1)，水的持续背压为600毫巴。在常闭状态下，在500 mbar的背压下测得的泄漏率为291 nl x min(-1)。微泵的总体尺寸为30.65 mm×13.35 mm×1 mm。传统的硅MEMS和有机硅聚合物微加工技术的结合降低了制造成本，提高了器件的性能。微泵的可能应用是一般的微流体领域，以及用于生物和化学应用(例如药物输送)的微剂量。(C)2011年爱思唯尔BM。版权所有。
This publication presents novel, normally-closed, bidirectional micropumps. Their main innovation is a fabrication process that combines traditional silicon micromachining with innovative, multifunctional polymer technologies.Therefore a flexible and robust wafer-level bonding technology, based on a laminable permanent dry-film photoresist from Ordyl SY300 Series is utilized. Moreover, using the photolithographic capabilities of Ordyl, 3D MEMS fluidic structures such as micro-channels or, in this study, the pump and valve chambers are simultaneously fabricated. To establish and integrate two flexible and particle tolerant normally-closed microvalves into the micropump, a commercially available photopatternable spin-on silicone (Dow Corning WL5150) is introduced into the manufacturing process. The definition of a reproducible mechanical pre-deformation (2.8 mu m) of the silicone material was obtained within the Ordyl wafer-bonding procedure. This combination of features yields the normally-closed character and results in an extremely small leakage-flow in the closed-state up to 500 mbar of applied backpressure. Furthermore, the usage of a multilayer piezo-actuator technology demonstrates the ability of considerably decreasing the piezo driving voltage from formerly applied 360V(p-p) (peak-to-peak) down to 30V(p-p).The designed micropumps work bidirectionally by simply applying a reversed actuation scheme. Due to the increased compression ratio of up to 0.512, the presented micropumps are self-priming and can pump water and air. Peak flowrates of 1.65 ml x min(-1) and a sustainable backpressure of 600 mbar for water are measured in the pumping mode. In the normally-closed state, a leak-rate of 291 nl x min(-1) is measured under 500 mbar of applied backpressure. The overall size of the micropump is 30.65 mm x 13.35 mm x 1 mm. The combination of traditional silicon MEMS and silicone-polymer microfabrication technologies reduces the manufacturing costs and boosts the device performance. Possible applications of the micropumps are the field of microfluidics in general, and micro dosing for biological and chemical applications (e.g. drug delivery). (C) 2011 Elsevier BM. All rights reserved.