T.Makabe: "Recent progress and issues in low temperature plasma modeling for material processings. (in Japanese)" Japanese Journal of Applied Physics. 64. 547-553 (1995)
T.Makabe: "Recent progress and issues in low temperature plasma modeling for material processings. (in Japanese)" Japanese Journal of Applied Physics. 64. 547-553 (1995)
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T.Makabe:“材料加工低温等离子体建模的最新进展和问题。(日语)”日本应用物理学杂志。
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