Optical, electrical, and electrochemical properties of indium tin oxide thin films studied in different layer-structures and their corresponding inorganic all-thin-film solid-state electrochromic devices
Optical, electrical, and electrochemical properties of indium tin oxide thin films studied in different layer-structures and their corresponding inorganic all-thin-film solid-state electrochromic devices
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DOI：
10.1116/1.4975823
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发表时间：
2017-02
期刊：
影响因子：
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通讯作者：
Mengying Wang;X. Diao;G. Dong;Yingchun He;Qirong Liu
中科院分区：
文献类型：
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作者：
Mengying Wang;X. Diao;G. Dong;Yingchun He;Qirong Liu
采用直流磁控溅射法在玻璃、PET、NiOx/ITO/玻璃、NiOx/ITO/PET、WO 3/ITO/玻璃和WO 3/ITO/PET六种不同的基底上制备了氧化铟锡（ITO）薄膜。在WO 3/ITO/glass上沉积的ITO具有很大的优越性，其电阻低至9.2 Ω/cm，平均透光率高达77.1%，达到了ITO薄膜光电性能的平衡。同时，在ITO（不同沉积参数）/玻璃上制备的WO 3电致变色膜具有接近完美的可逆性，电荷密度为20 mC/cm ~ 2，响应时间约为2-6 s。在优化ITO薄膜外层的基础上，制备了具有典型五层结构的电致变色器件。光电转换器件具有可逆的深蓝色和漂白循环、大的光学对比度、快速的响应时间和良好的稳定性。
In this investigation, the indium tin oxide (ITO) film layers were prepared by reactive direct current magnetron sputtering at room temperature with different deposition parameters on six different substrates: glass, polyethylene terephthalate (PET), NiOx/ITO/glass, NiOx/ITO/PET, WO3/ITO/glass, and WO3/ITO/PET. The ITO deposited on WO3/ITO/glass showed great advantage than others having a resistance as low as 9.2 Ω/◻ and a high average optical transmittance of 77.1% and reaching the balance between the optical and electrical properties of ITO thin films. Meanwhile, the WO3 film as electrochromism layer on ITO (under different deposited parameters)/glass shows nearly perfect reversibility, charge density of 20 mC/cm2, and fast response time of about 2–6 s. With the outer ITO thin film layer optimized, the electrochromic devices (ECDs) with typical five-layer structure were deposited. ECDs show the reversible dark-blue-coloration and bleaching cycles, large optical contrast, fast response time, and good sta...