Thermal Stability of DETF MEMS Resonators: Numerical Modelling and Experimental Validation
Thermal Stability of DETF MEMS Resonators: Numerical Modelling and Experimental Validation
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DOI：
10.1109/mems46641.2020.9056338
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发表时间：
2020-01
期刊：
影响因子：
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通讯作者：
V. Zega;A. Opreni;G. Mussi;Hyun-Keun Kwon;G. Vukasin;G. Gattere;G. Langfelder;A. Frangi;T. Kenny
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文献类型：
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作者：
V. Zega;A. Opreni;G. Mussi;Hyun-Keun Kwon;G. Vukasin;G. Gattere;G. Langfelder;A. Frangi;T. Kenny
报道了两种在[5°C-85°C]温度范围内具有低于350 ppm热稳定性的微机电系统（MEMS）双端音叉（DETF）谐振器的设计、制作和实验验证。还提供了一种具有高热稳定性和高品质因数的MEMS谐振器的优化设计策略，并与实验数据取得了良好的一致性。所提出的策略的主要优点是，它不需要任何实验校准的模型参数，并可以在原则上适用于不同种类的谐振器，从而代表了一个强大的工具，先验设计的热稳定的MEMS谐振器具有高品质因数。
The design, fabrication and experimental validation of two MicroElectroMechanical Systems (MEMS) Double-Ended Tuning-Fork (DETF) resonators that exhibit an intrinsic sub-350 ppm thermal stability in the temperature range [5°C–85°C] are reported. A strategy for the optimization of the design of MEMS resonators that exhibit high thermal stability and high quality factor is also provided and a good agreement with experimental data is achieved. The main advantage of the proposed strategy is that it does not require any experimental calibration of the model parameters and can be in principle applied to different kind of resonators, thus representing a powerful tool for the apriori design of thermally stable MEMS resonators with high quality factors.