Lower Bounds on the Frequency Estimation Error in Magnetically Coupled MEMS Resonant Sensors.
Lower Bounds on the Frequency Estimation Error in Magnetically Coupled MEMS Resonant Sensors.
复制标题
磁耦合 MEMS 谐振传感器频率估计误差的下限。
DOI：
10.1109/tbcas.2014.2377198
复制
发表时间：
2016
影响因子：
5.1
通讯作者：
Paden,BradE
中科院分区：
文献类型：
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作者：
Paden,BradE
MEMS电感电容(LC)谐振式压力传感器使腹主动脉瘤的治疗发生了革命性的变化。与静电驱动的MEMS谐振器不同，这些磁耦合设备是无线的，因此它们可以永久植入体内，并可以通过压力感应频率调制与外部线圈通信。考虑到这些传感器在这类应用和其他应用中的重要性，本文研究了传感器设计变量、系统噪声水平和系统整体性能之间的关系。具体地说，发展了一种新的模型，它通过一组耦合的代数方程组来表达关于系统变量的谐振器频率估计的方差的Cramér-Rao下界，可用于设计和优化。此外，除了LC类型的谐振器之外，还开发了一种新型的机械谐振器的模型。
MEMS inductor-capacitor (LC) resonant pressure sensors have revolutionized the treatment of abdominal aortic aneurysms. In contrast to electrostatically driven MEMS resonators, these magnetically coupled devices are wireless so that they can be permanently implanted in the body and can communicate to an external coil via pressure-induced frequency modulation. Motivated by the importance of these sensors in this and other applications, this paper develops relationships among sensor design variables, system noise levels, and overall system performance. Specifically, new models are developed that express the Cramér-Rao lower bound for the variance of resonator frequency estimates in terms of system variables through a system of coupled algebraic equations, which can be used in design and optimization. Further, models are developed for a novel mechanical resonator in addition to the LC-type resonators.