Plasma-enhanced chemical vapor deposition method to coat micropipettes with diamond-like carbon
Plasma-enhanced chemical vapor deposition method to coat micropipettes with diamond-like carbon
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DOI：
10.1063/1.1960829
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发表时间：
2005-06
影响因子：
1.6
通讯作者：
N. Kakuta;Mayu Watanabe;Yukio Yamada;N. Okuyama;K. Mabuchi
中科院分区：
文献类型：
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作者：
N. Kakuta;Mayu Watanabe;Yukio Yamada;N. Okuyama;K. Mabuchi
本文提供了一种通过等离子体增强化学气相沉积在玻璃微量移液器上涂覆类金刚石碳 (DLC) 的简单方法。该装置使用的阴极是薄金属涂层的微量移液器本身，阳极是网状圆柱体，其圆柱轴沿着微量移液器长度。为了产生均匀的等离子体并防止由于离子碰撞浓度而导致尖端温度升高，我们研究了网状圆柱形阳极的高度和直径对等离子体的影响。间歇沉积对于抑制温度上升和生产高质量DLC薄膜也很有效。测量的拉曼光谱和电阻率表明，可以在微量移液管上产生适合用作绝缘膜的DLC膜。这种涂层方法对于其他极小的探针也应该有用。
This article provides a simple method for coating glass micropipettes with diamond-like carbon (DLC) through plasma-enhanced chemical vapor deposition. The apparatus uses a cathode that is a thin-metal-coated micropipette itself and an anode that is a meshed cylinder with its cylinder axis along the micropipette length. To produce a uniform plasma and prevent a temperature increase at the tip due to ion collision concentration, we investigated the effect of the height and diameter of the meshed cylindrical anode on the plasma. Intermittent deposition is also effective for inhibiting the temperature rise and producing high quality DLC films. Measured Raman spectra and electric resistivity indicate that a DLC film suitable for use as an insulating film can be produced on the micropipette. This coating method should also be useful for other extremely small probes.