Power dissipated in low‐pressure radio‐frequency discharge plasmas
Power dissipated in low‐pressure radio‐frequency discharge plasmas
复制标题
低压射频放电等离子体中的功耗
DOI：
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发表时间：
1985
期刊：
影响因子：
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通讯作者：
V. Godyak
中科院分区：
文献类型：
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作者：
O. Popov;V. Godyak
电容性射频（rf）放电的实验研究是在低压（10−4-10−2 Torr）和射频施加电压低于200 V的汞蒸气中进行的。研究发现，在低于10−2 Torr的压力下，等离子体电子基本上通过电极鞘中形成的振荡势垒处的非碰撞机制获得rf能量。在这个过程中耗散的射频功率比电子通过与等离子体中的中性原子碰撞而接收到的功率要大得多。实验结果与作者之一早期开发的低压射频放电的理论模型吻合良好。
The experimental study of capacitive radio‐frequency (rf) discharges was performed in mercury vapor at low pressures (10−4–10−2 Torr) and at rf applied voltage below 200 V. It was found that at pressures less than 10−2 Torr, plasma electrons gain rf energy basically through a noncollisional mechanism at the oscillating potential barrier formed in electrode sheaths. The rf power dissipated in this process turned out to be much larger than that received by electrons through their collisions with neutral atoms in the plasma bulk. Experimental results are in good agreement with the theoretical model of low‐pressure rf discharges developed earlier by one of the authors.