Millimeter Wave Compact Branch Line Coupler Using Metal–Air–Metal Capacitors
Millimeter Wave Compact Branch Line Coupler Using Metal–Air–Metal Capacitors
复制标题
使用金属-空气-金属电容器的毫米波紧凑支线耦合器
DOI：
10.1143/jjap.44.371
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发表时间：
2005
影响因子：
1.5
通讯作者：
Jong‐Chul Lee
中科院分区：
文献类型：
--
作者：
T. Yun;Ki‐Byoung Kim;Han;D. Shin;Jong‐Chul Lee
在本文中，使用表面微加工在 GaAs 衬底上制造了紧凑的支线耦合器。它由电介质支持的气隙微带线 (DAML) 结构组成，这是一种带有气隙的低损耗传输线，可用于与其他微机电系统 (MEMS) 和/或 MMIC 组件集成。支线耦合器的尺寸减小是通过在结构内插入金属-空气-金属（MAM）电容器来实现的。该耦合器的隔离特性约为 21 dB，幅度和相位差分别小于 0.3 dB 和 2°。
In this paper, a compact branch line coupler fabricated on a GaAs substrate using surface micromachining. It is composed of a dielectric-supported air-gapped microstrip line (DAML) structure, which is a low-loss transmission line with an air-post and is useful for integration with other micro electro-mechanical system (MEMS) and/or MMIC components. The size reduction of the branch line coupler is accomplished by the insertion of metal–air–metal (MAM) capacitors within the structure. The coupler shows an isolation characteristic of approximately 21 dB and differences in magnitude and phase of less than 0.3 dB and 2°, respectively.