Ring Oscillator Frequency Measurements Using an Automated Parametric Test System
Ring Oscillator Frequency Measurements Using an Automated Parametric Test System
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使用自动参数测试系统测量环形振荡器频率
DOI：
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发表时间：
2008
期刊：
影响因子：
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通讯作者：
Yang Pan
中科院分区：
文献类型：
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作者：
Yang Pan
使用自动参数测试（APT）系统（如Keithley S680测试仪）来测量环形振荡器测试结构，为测试工程师提供了一个在线工具来监控半导体制造质量并实时诊断生产问题。环形振荡器测试结构已经使用了几十年，并继续在先进技术的过程监测中发挥关键作用。在90nm技术节点，单级环形振荡器的频率可高达100GHz。幸运的是，可以设计一个多级环形振荡器与分频器相结合，将输出频率降至100MHz以下，使频率测量更便宜，更可行。本白皮书展示了一种实用、低成本、高通量的环形振荡器频率测量方法。
Using an Automated Parametric Test (APT) System, such as the Keithley S680 tester, to measure ring oscillator test structures provides test engineers with an inline tool to monitor semiconductor manufacturing quality and diagnose production problems in real time. Ring oscillator test structures have been in use for decades and continue to play a critical role in process monitoring of advanced technologies. At the 90nm technology node, a single-stage ring oscillator’s frequency can be as high as 100GHz. Fortunately, a multi-stage ring oscillator coupled with a frequency divider can be designed to down-convert the output frequency to less than 100MHz, making frequency measurements less expensive and more feasible. This white paper demonstrates a practical, low cost, and high throughput method for measuring ring oscillator frequency.