Electrochemical decomposition of bromosilanes made from kerf loss silicon and deposition of crystalline silicon
Electrochemical decomposition of bromosilanes made from kerf loss silicon and deposition of crystalline silicon
复制标题
切口损失硅制备溴硅烷的电化学分解和晶体硅的沉积
DOI:
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发表时间:
2015
期刊:
影响因子:
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通讯作者:
Yuma Yahata
中科院分区:
文献类型:
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作者:
Kazuaki Tomono;Ryo Sakamoto;Masahiro Okada;Shunta Kakihara;Yoshinori Tamaki;Yuma Yahata