Design, fabrication and characterization of capacitive humidity sensors based on emerging flexible technologies
Design, fabrication and characterization of capacitive humidity sensors based on emerging flexible technologies
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DOI：
10.1016/j.snb.2019.02.043
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发表时间：
2019-05-15
影响因子：
8.4
通讯作者：
Rodriguez, Noel
中科院分区：
文献类型：
--
作者：
Romero, Francisco J.;Rivadeneyra, Almudena;Rodriguez, Noel
这项工作提供了两种新兴的柔性电子产品导电图形制造技术的案例比较：喷墨打印和激光划线生产纳米石墨烯。特别是，这两种方法被用来制备以Kapton(R)HN聚酰亚胺为支撑柔性衬底的平面交指电极(IDE)电容器。银基电极是通过喷墨打印制造的，而激光划线技术是用来从裸露的聚酰亚胺基板上沉积氧化石墨烯(GO)和激光诱导石墨烯(LIG)布局获得激光还原氧化石墨烯(LASER-RGO)图案。比较了这些IDE电容器作为相对湿度(RH)传感器的应用。根据对相对湿度的灵敏度以及考虑频率依赖性的热漂移和线性度，对不同的传感器进行基准测试。结果表明，与文献中其他同类电容式传感器相比，所制造的电容结构具有很强的竞争力。此外，喷墨打印和基于LIG的电容器因其热稳定性和线性度而脱颖而出。
This work presents a case-based comparison between two emerging fabrication techniques for the development of conductive patterns for flexible electronics: inkjet-printing and nanographene production by laser-scribing. In particular, these two methods are used to fabricate planar interdigitated electrode (IDE) capacitors with Kapton (R) HN polyimide as supporting flexible substrate. Silver-based electrodes are manufactured by inkjet-printing, while a laser-scribing technique is used to obtain laser-reduced graphene oxide (laser-rGO) patterns from deposited graphene oxide (GO) and laser-induced graphene (LIG) layouts from the bare polyimide substrate. The comparison is focused on the application of these IDE capacitors as relative humidity (RH) sensors. The different sensors are benchmarked in terms of sensitivities to RH as well as thermal drift and linearity considering frequency dependencies. The results show that the manufactured capacitors exhibit a very competitive performance as capacitive structures when compared with other similar capacitive sensors from the literature. Furthermore, inkjet-printed and LIG-based capacitors stand out for its thermal stability and linearity.