Modeling of ablation of the target material for the plasma for coherent and incoherent EUV sources
Modeling of ablation of the target material for the plasma for coherent and incoherent EUV sources
复制标题
相干和非相干 EUV 源的等离子体目标材料烧蚀建模
DOI：
10.1007/978-3-319-73025-7_55
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发表时间：
2018
期刊：
影响因子：
--
通讯作者：
T. Nishikawa
中科院分区：
文献类型：
--
作者：
A. Sasaki;A. Sunahara;K. Nishihara;T. Nishikawa
在用于激光泵浦相干和非相干光源的金属靶的烧蚀期间，有时会发射粒子。这些粒子对激光器的吸收效率、等离子体的密度和温度分布以及因此对源的性能具有显著影响。我们提出了一个基于拉格朗日流体动力学的颗粒排放模拟模型，考虑到液体到气体的过渡，使用动态网格重组技术。
Particles are sometimes emitted during the ablation of the metal targets used for laser pumped coherent and incoherent light sources. These particles have a significant effect on the absorption efficiency of the laser, on the density and temperature distribution of the plasmas, and thus on the performance of the source. We propose a simulation model of the particle emission based on Lagrangian hydrodynamics taking the liquid-to-gas transition into account using a dynamic mesh reorganization technique.