Graphite-like carbon films by high power impulse magnetron sputtering
Graphite-like carbon films by high power impulse magnetron sputtering
复制标题
高功率脉冲磁控溅射类石墨碳薄膜
DOI：
10.1016/j.apsusc.2013.06.109
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发表时间：
2013-10-15
影响因子：
6.7
通讯作者：
Wang, Aiying
中科院分区：
文献类型：
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作者：
Huang, Meidong;Zhang, Xueqian;Wang, Aiying
采用大功率脉冲磁控溅射（HiPIMS）与直流磁控溅射（dcMS）并联制备了类石墨非晶碳（GLC）薄膜。在薄膜沉积过程中，在HiPIMS中施加不同的脉冲电压。研究了HiPIMS沉积的GLC薄膜的结构和力学性能。用x射线光电子能谱（XPS）和拉曼光谱分析了膜的成键结构。原子力显微镜（AFM）和纳米压痕分别表征了表面质量和显微硬度。利用激光测试仪测量薄膜的曲率，计算薄膜的内应力。用球盘式摩擦计研究了GLC薄膜在环境条件下的摩擦学行为。研究了脉冲电压对GLC薄膜沉积速率、内应力、力学性能和摩擦学性能的影响。对结果进行了分析和讨论。(c) 2013 Elsevier B.V.版权所有
High-power impulse magnetron sputtering (HiPIMS), coupled with a direct-current magnetron sputtering (dcMS) in parallel, was employed to fabricate graphite-like amorphous carbon (GLC) films. Different impulse voltages were applied in HiPIMS during the film deposition. The structure and mechanical properties of the GLC films deposited by the HiPIMS were investigated. The bonding structure of the films was analyzed by X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. Atomic force microscopy (AFM) and Nano-indentation were used to characterize the surface quality and micro-hardness, respectively. Internal stress of the films was calculated based on the curvature measured by a laser tester. Tribological behavior of the GLC films is studied by a ball-on-disk tribometer in ambient condition. The effects of impulse voltage on deposition rate, internal stress, mechanical and tribological properties of the GLC films were investigated. The results are analyzed and discussed. (c) 2013 Elsevier B.V. All rights reserved.