Evaluation of Longitudinal Displacement for Lead Zirconate Titanate Films
Evaluation of Longitudinal Displacement for Lead Zirconate Titanate Films
复制标题
锆钛酸铅薄膜纵向位移的评价
DOI：
10.1143/jjap.41.6735
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发表时间：
2002
影响因子：
1.5
通讯作者：
H. Matsuda
中科院分区：
文献类型：
--
作者：
T. Iijima;S. Ito;H. Matsuda
将原子力显微镜（AFM）探针系统与铁电测试系统连接，在5 Hz的大交流驱动信号下同时测量极化滞后（P-E）曲线和纵向位移特性，因为该测量系统具有能够动态评估纵向位移和直接比较铁电和压电特性的优点。随着顶部电极直径从500 μm减小到30 μm，纵向位移方向从负变为正，因为纵向压电效应变得占主导地位。对于30 µ m直径的顶部电极，使用单极信号（+5 V，5 Hz）计算的纵向压电常数为d33 =108 pm/V。这个值低于散装PZT，但高于使用双光束激光干涉仪或原子力显微镜与约1 kHz的小交流信号测量的报告数据。
An atomic force microscope (AFM) probing system was connected with a ferroelectric test system to measure the polarization hysteresis (P–E) curve and longitudinal displacement properties simultaneously with a large AC drive signal at 5 Hz, since this measurement system has the advantages of enabling dynamic evaluation of longitudinal displacement and direct comparison of the ferroelectric and piezoelectric properties. With decreasing the top electrode diameter from 500 to 30 µm, the longitudinal displacement direction changes from negative to positive since the longitudinal piezoelectric effect becomes dominant. The longitudinal piezoelectric constant calculated with a unipolar signal (+5 V, 5 Hz) was d33 =108 pm/V for a 30-µm-dia top electrode. This value is lower than that of bulk PZT but higher than that of reported data measured using the double-beam laser interferometer or the AFM with a small AC signal of about 1 kHz.