Cathodic arc deposition of (Al,Cr)2O3: Macroparticles and cathode surface modifications
Cathodic arc deposition of (Al,Cr)2O3: Macroparticles and cathode surface modifications
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DOI：
10.1016/j.surfcoat.2011.09.028
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发表时间：
2011-12
影响因子：
5.4
通讯作者：
M. Pohler;R. Franz;J. Ramm;P. Polcik;C. Mitterer
中科院分区：
文献类型：
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作者：
M. Pohler;R. Franz;J. Ramm;P. Polcik;C. Mitterer
本文研究了电弧蒸发（Al，Cr）2 O3涂层中宏观颗粒的微观结构和化学成分。根据扫描和透射电子显微镜分析，可以区分两种不同类型的宏观颗粒，它们的形状有明显的差异，并且它们的化学组成（即Al/Cr比）有明显的变化。此外，还利用扫描电镜和X射线衍射研究了相应的Al-Cr复合阴极在氧气气氛中蒸发过程中的表面转变。除原始阴极材料外，还发现了由各种金属间化合物AlxCry相组成的反应层，这些相具有细晶形貌和柱状Al 2 O3岛，并讨论了宏观颗粒的来源与Al-Cr阴极表面所观察到的改性之间的关系。
The present work investigates the microstructure and chemical composition of macroparticles incorporated in arc evaporated (Al,Cr)2O3coatings. According to scanning and transmission electron microscopy analysis, two different types of macroparticles with a distinct difference in their shape and a noticeable variation in their chemical composition, i.e. the Al/Cr ratio, can be distinguished. In addition, the transformations on the surface of the corresponding Al–Cr compound cathodes during the evaporation process in O2atmosphere are studied by scanning electron microscopy and X-ray diffraction. Beside the virgin cathode material, a reaction layer consisting of various intermetallic AlxCryphases with a fine-grained morphology and pillar-shaped Al2O3islands was found. Correlations between the origin of the macroparticles and the observed modifications at the surface of the Al–Cr cathode are discussed.