An electromagnetic scanning mirror integrated with blazed grating and angle sensor for a near infrared micro spectrometer
An electromagnetic scanning mirror integrated with blazed grating and angle sensor for a near infrared micro spectrometer
复制标题
一种集成闪耀光栅和角度传感器的近红外微型光谱仪电磁扫描镜
DOI：
10.1088/1361-6439/aa85cd
复制
发表时间：
2017-12-01
影响因子：
2.3
通讯作者：
Chang, Fei
中科院分区：
文献类型：
--
作者：
Zhou, Ying;Wen, Quan;Chang, Fei
本文提出了一种用于近红外显微光谱仪的电磁扫描镜与闪耀光栅和角度传感器的集成结构。该器件通过利用微机电系统（MEMS）技术制造在涂覆有铝的7.9度偏离取向（111）的硅衬底上。该MEMS电磁扫描光栅反射镜不仅通过集成闪耀光栅实现了高衍射效率，而且通过在反射镜扫描过程中设计角度传感器实现了扫描角度的闭环控制。最后，为了验证所提出的装置的有效性，近红外显微光谱仪。该MEMS电磁扫描光栅镜的使用使得近红外微型光谱仪能够精确地跨越800 nm-1800 nm的光谱范围。基于这种结构，近红外微型光谱仪是非常简单的，只有一个单一的InGaAs光电探测器实现，而不是一个探测器阵列。
This work presents an electromagnetic scanning mirror integrated with blazed grating and an angle sensor for a near infrared micro spectrometer. This device is fabricated on an aluminum coated 7.9 degrees off-oriented (1 1 1) silicon substrate by utilizing the micro-electro-mechanical systems (MEMS) technology. The proposed MEMS electromagnetic scanning grating mirror not only provides high diffraction efficiency by integrating blazed grating, but also realizes the closed-loop control of the scanning angle by designing an angle sensor during the mirror scanning. Finally, in order to verify the effectiveness of this proposed device, the near infrared micro spectrometer is presented. The use of this MEMS electromagnetic scanning grating mirror allows the near infrared micro spectrometer to span a spectral range of 800 nm-1800 nm accurately. Based on this configuration, the near infrared micro spectrometer is extremely simple and only one single InGaAs photodetector is achieved, instead of a detector array.