Midori Kawamura: "Characterization of thin,transparent and conductive TiN films prepared by radio frequency sputtering" Jounal of Vacuum Science & Technology A. 16・1. 200-202 (1998)

Midori Kawamura: "Characterization of thin,transparent and conductive TiN films prepared by radio frequency sputtering" Jounal of Vacuum Science & Technology A. 16・1. 200-202 (1998)
复制标题

Midori Kawamura:“通过射频溅射制备的薄、透明和导电 TiN 薄膜的表征”真空科学与技术杂志 A. 16・1 (1998)。

DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
--
中科院分区:
--
文献类型:
--
作者:

文献摘要

相似文献