Micromachined electrodes for biopotential measurements
Micromachined electrodes for biopotential measurements
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DOI：
10.1109/84.911086
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发表时间：
2001-03-01
影响因子：
2.7
通讯作者：
Stemme, G
中科院分区：
文献类型：
--
作者：
Griss, P;Enoksson, P;Stemme, G
我们描述了微机械加工的干式生物电位电极的微制造、封装和测试(即，在不需要电解胶的情况下)。它由一系列微尺寸、非常锋利的尖刺(即针头)组成，旨在穿透人体皮肤，绕过与外层皮肤相关的高阻抗问题。通过深反应离子刻蚀在硅中刻蚀尖峰，然后在其上覆盖银-氯化银(Ag-AgCl)双层。与使用电解凝胶的标准电极相比，尺寸为4×4 mm(2)的干尖电极的电极-皮肤-电极阻抗降低，并且具有类似的大小，记录的由大脑活动产生的低幅度生物电信号(即，EEG信号)是高质量的，即使对于小到2×2 mm(2)的尖峰电极(2)。尖峰电极在生物医学应用中为标准电极提供了一种很有前途的替代选择，并在新生物医学方法的研究中引起了人们的兴趣。
We describe the microfabrication, packaging and testing of a micromachined dry biopotential electrode, (i.e., where electrolytic gel is not required). It consists of an array of micro-dimensioned, very sharp spikes, (i.e., needles) designed for penetration of human skin which circumvent high impedance problems associated with layers of tbe outer skin. The spikes are etched in silicon by deep reactive ion etching and are subsequently covered with a silver-silverchloride (Ag-AgCl) double layer. The electrode-skin-electrode impedance of dry spiked electrodes having a size of 4 x 4 mm(2) is reduced compared to standard electrodes using electrolytic gel and having a comparable size, Recorded low amplitude biopotentials resulting from the activity of the brain, (i.e, EEG signals) are of high quality, even for spiked electrodes as small as 2 x 2 mm(2). The spiked electrode offers a promising alternative to standard electrodes in biomedical applications and is of interest in research of nem biomedical methods.