Non-seed chemical bath deposition of ZnO films in a rotating continuous flow reactor with various carboxylic acids and their application to transparent conductive films
Non-seed chemical bath deposition of ZnO films in a rotating continuous flow reactor with various carboxylic acids and their application to transparent conductive films
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各种羧酸在旋转连续流反应器中非种子化学浴沉积 ZnO 薄膜及其在透明导电薄膜中的应用
DOI：
10.1039/d2ce01136k
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发表时间：
2022
期刊：
影响因子：
3.1
通讯作者：
Ogura Atsushi
中科院分区：
文献类型：
--
作者：
Wagata Hajime;Shioiri Naoya;Tanaka Yuya;Yokogawa Ryo;Ogura Atsushi
采用无籽晶化学浴沉积法（CBD），在旋转流动反应器中成功制备了ZnO薄膜。ZnO薄膜的微结构控制对于各种应用都很重要，而致密的结构对于透明导电薄膜很重要。柠檬酸和柠檬酸盐通常用于在水溶液中获得致密的ZnO薄膜，因为ZnO晶体的生长可以通过它们在特定平面上的吸附来控制。然而，柠檬酸盐如何附着在ZnO表面以及它们的羧酸盐和羟基基团的作用仍然不清楚。在这项研究中，各种羧酸，如丙三羧酸，乌头酸，苹果酸，酒石酸，和乙醇酸，其中具有不同数量的羧基和羟基的柠檬酸，被用来检查它们对ZnO晶体生长的影响。羧酸根和羟基对ZnO晶体生长的影响和作用进行了显示和讨论。此外，所获得的致密ZnO薄膜的电学性能和紫外-可见光（UV-vis）透射率进行了研究和报告，以显示透明导体的性能。
ZnO films were successfully fabricated by non-seed chemical bath deposition (CBD) using a rotating flow reactor without seed layers. The microstructural control of ZnO films is important for various applications, and dense structures are important for transparent conductive films. Citric acid and citrates are often used to obtain dense ZnO films in aqueous solution because ZnO crystal growth can be controlled by their adsorption on a specific plane. However, how citrates attach to ZnO surfaces and the roles of their carboxylate and hydroxyl groups are still unclear. In this study, various carboxylic acids, such as tricarballylic acid, aconitic acid, malic acid, tartaric acid, and glycolic acid, which have different numbers of carboxylic and hydroxyl groups from that of citric acid, are used to examine their effect on ZnO crystal growth. The effect and roles of the carboxylate and hydroxyl groups on ZnO crystal growth are shown and discussed. Further, the electrical properties and ultraviolet-visible (UV-vis) transmittance of the obtained dense ZnO films are investigated and reported to show the properties of transparent conductors.