Precise positioning using electrostatic glass motor
Precise positioning using electrostatic glass motor
复制标题
采用静电玻璃电机精确定位
DOI：
10.1016/s0141-6359(01)00112-x
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发表时间：
2002
期刊：
影响因子：
--
通讯作者：
T. Higuchi
中科院分区：
文献类型：
--
作者：
R. Moser;T. Higuchi
本文介绍了静电玻璃马达在精密定位中的应用。它将被证明，通过利用玻璃的一个属性，其表面上的静电场，亚微米和亚弧秒位移诱导的相对稳定的电荷排列可以实现。基于这一原理，提出了一种具有两个线性和一个旋转自由度的工作台。其潜力是通过实验确定的一个旋转自由度。所提出的新形式的定位的主要优点是其长行程，紧凑和简单。
This paper reports the application of electrostatic glass motors to precise positioning. It will be shown that by drawing advantage of a property of glasses, the relatively stable charge arrangements on its surface induced by an electrostatic field, sub-micrometric and sub-arcsec displacements can be achieved. Based on this principle, a stage featuring two linear and one rotative degree-of-freedom will be proposed. Its potential is experimentally determined on one rotative degree-of-freedom. The main advantages of the proposed novel form of positioning are its long stroke, compactness and simplicity.