Laser 3D Printing of Inorganic Free-Form Micro-Optics
Laser 3D Printing of Inorganic Free-Form Micro-Optics
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DOI：
10.3390/photonics8120577
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发表时间：
2021-12-01
期刊：
影响因子：
2.4
通讯作者：
Malinauskas, Mangirdas
中科院分区：
文献类型：
--
作者：
Gonzalez-Hernandez, Diana;Varapnickas, Simonas;Malinauskas, Mangirdas
实验验证了激光3D打印无机自由曲面微光学器件的可行性。采用超快激光直写(LDW)纳米光刻技术制备了有机-无机杂化材料SZ2080(TM)，并进行了高温焙烧后处理。这种组合允许生产3D建筑，而热处理的结果是将材料转化为无机物质。对所制得的微型光学元件进行了表征，并展示了其光学性能。最后，该概念在叠层透镜等复合光学元件的制造中得到了验证。这为激光制造的微光学在高强度辐射、温度、酸性环境、压力变化等恶劣条件下的新方向和新应用打开了大门，包括开放空间、天体光子学和遥感。
A pilot study on laser 3D printing of inorganic free-form micro-optics is experimentally validated. Ultrafast laser direct-write (LDW) nanolithography is employed for structuring hybrid organic-inorganic material SZ2080(TM) followed by high-temperature calcination post-processing. The combination allows the production of 3D architectures and the heat-treatment results in converting the material to inorganic substances. The produced miniature optical elements are characterized and their optical performance is demonstrated. Finally, the concept is validated for manufacturing compound optical components such as stacked lenses. This is an opening for new directions and applications of laser-made micro-optics under harsh conditions such as high intensity radiation, temperature, acidic environment, pressure variations, which include open space, astrophotonics, and remote sensing.