Erratum: "High power impulse magnetron sputtering: Current-voltage-time characteristics indicate the onset of sustained self-sputtering" [J. Appl. Phys. 102, 113303 (2007)]
Erratum: "High power impulse magnetron sputtering: Current-voltage-time characteristics indicate the onset of sustained self-sputtering" [J. Appl. Phys. 102, 113303 (2007)]
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勘误:“高功率脉冲磁控溅射:电流-电压-时间特性表明持续自溅射的开始”[J。
DOI:
10.1063/1.2875523
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发表时间:
2008
影响因子:
3.2
通讯作者:
Anders A
中科院分区:
文献类型:
--
作者:
Anders A