Three-dimensional kinetic Monte Carlo simulation of prepatterned quantum-dot island growth
Three-dimensional kinetic Monte Carlo simulation of prepatterned quantum-dot island growth
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DOI：
10.1063/1.2812572
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发表时间：
2007-11
影响因子：
4
通讯作者：
E. Pan;M. Sun;P. Chung;R. Zhu
中科院分区：
文献类型：
--
作者：
E. Pan;M. Sun;P. Chung;R. Zhu
提出了一种用于各向异性半导体基底上空间有序自组织量子点的特殊预图像化方法。利用三维动力学蒙特卡罗模拟，原子以不同的中间中断时间沉积。我们证明了中断时间和长程各向异性应变能对岛屿尺寸均匀性和横向排列的影响。
A special prepatterning method is proposed for spatially ordered self-organizing quantum dots on anisotropic semiconductor substrates. Using three-dimensional kinetic Monte Carlo simulations, atoms are deposited with varying intermediate interruption times. We demonstrate the effect of interruption time and long-range anisotropic strain energy on island size uniformity and lateral alignment.