Kinetic investigation of the planar multipole resonance probe in the low-pressure plasma
Kinetic investigation of the planar multipole resonance probe in the low-pressure plasma
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DOI：
10.1088/1361-6595/ac27bb
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发表时间：
2021-10-01
影响因子：
3.8
通讯作者：
Brinkmann, Ralf Peter
中科院分区：
文献类型：
--
作者：
Wang, Chunjie;Friedrichs, Michael;Brinkmann, Ralf Peter
主动等离子体共振光谱 (APRS) 是一种成熟的等离子体诊断方法：通过探针或天线将射频信号耦合到等离子体中，激发其振荡，并通过数学模型评估响应。大多数 APRS 探针都是侵入性的，并通过其物理存在扰乱等离子体。平面多极共振探头（pMRP）解决了这个问题：它可以集成到腔室壁中并最大限度地减少扰动。之前的工作在 Drude 模型框架下研究了 pMRP，但它忽略了重要的动力学效应，例如无碰撞阻尼。在这项工作中，开发了一种无碰撞动力学模型来进一步研究 pMRP 的行为。该模型由 Vlasov 方程组成，该方程与静电近似下的 Poisson 方程耦合。通过计算复数导纳可以得到探针-等离子体系统的光谱响应。该模型涵盖了动力学效应并克服了 Drude 模型的局限性。
Active Plasma Resonance Spectroscopy (APRS) is a well-established plasma diagnostic method: a radio frequency signal is coupled into the plasma via a probe or antenna, excites it to oscillate, and the response is evaluated through a mathematical model. The majority of APRS probes are invasive and perturb the plasma by their physical presence. The planar multipole resonance probe (pMRP) solves this problem: it can be integrated into the chamber wall and minimize the perturbation. Previous work has studied the pMRP in the frame of the Drude model, but it misses important kinetic effects like collision-less damping. In this work, a collision-less kinetic model is developed to further investigate the behavior of the pMRP. This model consists of the Vlasov equation, which is coupled with the Poisson equation under electrostatic approximation. The spectral response of the probe-plasma system is found by calculating the complex admittance. This model covers the kinetic effects and overcomes the limitations of the Drude model.