Control of the spatial distribution and crystal orientation of self-organized Au nanoparticles
Control of the spatial distribution and crystal orientation of self-organized Au nanoparticles
复制标题
自组织金纳米粒子的空间分布和晶体取向的控制
DOI：
10.1088/0957-4484/27/38/385605
复制
发表时间：
2016
期刊：
影响因子：
3.5
通讯作者：
Masaki Takeguchi and Akimitsu Morisako
中科院分区：
文献类型：
--
作者：
Yukiko Yasukawa;Xiaoxi Liu;Sagar E Shirsath;Hisayuki Suematsu;Yukio Kotaki;Yoshihiro Nemoto;Masaki Takeguchi and Akimitsu Morisako
采用射频磁控溅射法制备了有序的二维自组织Au纳米粒子。颗粒形状均匀，尺寸超细（3-7 nm），并显示出约1012英寸-2的颗粒密度。采用低溅射功率密度和最小化溅射时间（1分钟）的定制开发的溅射装置用于显著简化Au纳米颗粒制造的制备条件。通过在Au纳米颗粒和衬底之间放置Ta界面层以及在形成Au纳米颗粒之后在Ar气氛中对样品进行后退火来严格控制Au纳米颗粒的空间分布。界面层和后退火步骤导致衬底表面上的大约40%的Au纳米颗粒在（111）方向上取向。该方法显示出产生显示出纳米级表面密度的超细Au纳米颗粒。纳米颗粒的晶体取向可以相对于基底表面精确地控制。因此，这种技术有望提供可调纳米结构的高性能电子器件领域的应用。
Ordered, two-dimensional, self-organized Au nanoparticles were fabricated using radiofrequency (RF) magnetron sputtering. The particles were uniformly spherical in shape and ultrafine in size (3–7 nm) and showed an ultrahigh density in the order of∼ 10 12 inch–2. A custom-developed sputtering apparatus that employs low sputtering power density and a minimized sputtering time (1 min) was used to markedly simplify the preparation conditions for Au nanoparticle fabrication. The spatial distribution of Au nanoparticles was rigorously controlled by placing a Ta interfacial layer between the Au nanoparticles and substrate as well as by post-annealing samples in an Ar atmosphere after the formation of Au nanoparticles. The interfacial layer and the post-annealing step caused approximately 40% of the Au nanoparticles on the substrate surface to orient in the (111) direction. This method was shown to produce ultrafine Au nanoparticles showing an ultrahigh surface density. The crystal orientation of the nanoparticles can be precisely controlled with respect to the substrate surface. Therefore, this technique promises to deliver tunable nanostructures for applications in the field of high-performance electronic devices.