CHARACTERIZATION OF A THICKNESS-SHEAR MODE QUARTZ RESONATOR WITH MULTIPLE NONPIEZOELECTRIC LAYERS
CHARACTERIZATION OF A THICKNESS-SHEAR MODE QUARTZ RESONATOR WITH MULTIPLE NONPIEZOELECTRIC LAYERS
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DOI：
10.1063/1.356410
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发表时间：
1994-02-01
影响因子：
3.2
通讯作者：
MARTIN, SJ
中科院分区：
文献类型：
--
作者：
GRANSTAFF, VE;MARTIN, SJ
本文描述了一个一维分析的压电谐振器与多个非压电层的任意厚度和复杂的剪切模量。该分析显示了在什么条件下可以使用简单的Butterm-Van Dyke（BVD）集总元件等效电路来提取这些层的特性，并且为在这些条件下这样做提供了理论基础。这里提出的方法基于波传播的物理学，但是使用传输线技术将方程和边界条件转换为简单的2 × 2矩阵乘法串，其容易地容纳任意数量的层。由于AT切石英/聚合物/液体复合谐振器在传感器和电化学石英晶体微天平应用中的重要性，详细分析了AT切石英/聚合物/液体复合谐振器。分析表明，在BVD电路的运动臂中添加聚合物和液体阻抗在聚合物膜共振附近是无效的，但对于与液体接触的薄的刚性聚合物膜是适当的。
This paper describes a one-dimensional analysis of a piezoelectric resonator with multiple nonpiezoelectric layers of arbitrary thickness and complex shear modulus. This analysis shows under what conditions the simple Butterworth-Van Dyke (BVD) lumped-element equivalent circuit can be used to extract the properties of these layers, and provides a theoretical basis for doing so under these conditions, The method presented here is based on the physics of wave propagation, but uses transmission line techniques to transform the equations and boundary conditions into a simple string of 2 X 2 matrix multiplications, which easily accommodate any number of layers. An analysis of the AT-cut quartz/polymer/liquid composite resonator is presented in detail because of its importance in sensor and electrochemical quartz crystal microbalance applications. The analysis shows that adding the polymer and liquid impedances in the motional arm of a BVD circuit is not valid near the polymer film resonance, but is appropriate for a thin, rigid polymer film in contact with a liquid.